RCF Slurry Piping Design (Semiconductor)

RCF Slurry Piping Design (Semiconductor)

JOB DESCRIPTION – SLURRY SYSTEMS DESIGN MANAGER

Project: Semiconductor Manufacturing Facility
Department: Engineering / Design
Position: Slurry Systems Design Manager
Experience: Minimum 10 years of relevant experience
Reporting To: Engineering Manager / Project Engineering Head

1. Job Purpose

To lead slurry systems design and engineering for semiconductor manufacturing facilities, with particular focus on Chemical Mechanical Planarization (CMP) slurry storage, preparation, distribution, recirculation, and point-of-use delivery systems. The role is responsible for engineering design, hydraulic analysis, equipment selection, technical reviews, vendor coordination, multidisciplinary interfaces, and delivery of safe, reliable, and contamination-controlled slurry systems in accordance with project specifications and schedules.

2. Key Responsibilities

A. Slurry Systems Design

• Lead the design and engineering of slurry storage, preparation, transfer, distribution, and recirculation systems for semiconductor fabrication facilities.
• Develop design criteria and system configurations based on CMP tool requirements, slurry characteristics, consumption rates, and operating conditions.
• Review and develop Process Flow Diagrams (PFDs), Piping and Instrumentation Diagrams (P&IDs), equipment layouts, and piping arrangements.
• Design slurry supply and return headers, recirculation loops, distribution units, and point-of-use connections.
• Coordinate slurry flow rates, pressure, temperature, consumption, and interface requirements with CMP equipment suppliers.
• Ensure appropriate provisions for system capacity, operational reliability, maintainability, and future expansion.

B. Hydraulic Analysis and Equipment Sizing

• Perform and review hydraulic calculations, flow distribution analysis, pressure drop calculations, and pump sizing.
• Use hydraulic analysis software such as PIPE-FLO Professional, AFT Fathom, or equivalent tools for slurry network analysis, where appropriate.
• Select and size slurry pumps, storage tanks, mixing tanks, filters, and associated equipment.
• Evaluate slurry viscosity, density, solids concentration, particle-size distribution, and settling characteristics when establishing design parameters.
• Review pump operating points and system resistance to ensure stable delivery to CMP tools.
• Assess the need for flushing, recirculation, mixing, and draining based on slurry supplier and process tool requirements.

C. Piping and Material Selection

• Select suitable piping materials, valves, fittings, pumps, tanks, seals, and wetted components based on slurry compatibility, cleanliness, and project specifications.
• Evaluate PFA, PTFE, PVDF, PP, and other approved materials for the intended slurry application.
• Review piping layouts for hydraulic performance, drainability, accessibility, maintainability, and minimization of dead legs.
• Ensure appropriate provisions for flushing, cleaning, drainage, and maintenance.
• Coordinate equipment connections, piping interfaces, and installation requirements with CMP tools and slurry package vendors.

D. Slurry Quality and Contamination Control

• Establish design requirements for maintaining slurry quality from storage to point of use.
• Evaluate risks associated with sedimentation, particle agglomeration, contamination, and slurry degradation.
• Review requirements for agitation, mixing, recirculation, filtration, and particle control based on slurry supplier recommendations.
• Coordinate flow, pressure, differential pressure, and other instrumentation requirements.
• Ensure system design supports reliable slurry delivery and minimizes contamination risks and unplanned interruptions.

E. Engineering Deliverables and Technical Reviews

• Prepare, review, and approve engineering deliverables within delegated authority, including:
  • Design basis and system design criteria.
  • PFDs and P&IDs.
  • Hydraulic calculations and pump sizing reports.
  • Equipment datasheets and technical specifications.
  • Line lists, valve lists, and instrument lists.
  • Equipment layouts and piping drawings.
  • BOQs, MTOs, and procurement specifications.
• Ensure technical consistency across drawings, calculations, specifications, and vendor documentation.
• Review design comments and ensure timely closure of technical issues.
• Maintain engineering document revisions and submission schedules.

F. Vendor and Procurement Coordination

• Coordinate with CMP tool suppliers, slurry system package vendors, pump manufacturers, tank manufacturers, and filtration equipment suppliers.
• Review vendor proposals, drawings, datasheets, and technical submittals.
• Perform technical bid evaluations and resolve technical deviations and clarifications.
• Verify compliance with project specifications, process requirements, and equipment interface requirements.
• Coordinate vendor document approvals with procurement and project schedules.
• Identify design gaps and technical risks before purchase order release.

G. Software and Digital Engineering

• Use PIPE-FLO Professional, AFT Fathom, or equivalent for hydraulic analysis, as applicable.
• Use AutoCAD for reviewing P&IDs, piping layouts, and engineering drawings.
• Use Navisworks Manage for 3D model reviews, clash detection, and constructability coordination.
• Review models using Revit, Plant 3D, AVEVA E3D, or Smart 3D, depending on the project platform.
• Use Microsoft Excel for engineering calculations, data analysis, and equipment sizing.
• Use Bluebeam Revu or equivalent tools for drawing markups and technical document reviews.
• Validate software inputs, assumptions, and results against design criteria and vendor data.

H. Multidisciplinary Coordination

• Coordinate with process, piping, electrical, instrumentation, HVAC, civil, structural, and wastewater engineering teams.
• Resolve equipment layout constraints, piping routing conflicts, utility interfaces, and maintenance access requirements.
• Participate in design reviews and 3D model coordination meetings.
• Coordinate slurry waste collection and interfaces with wastewater treatment systems.
• Provide engineering support for technical queries, installation, commissioning, and troubleshooting.

I. Safety, Quality, and Compliance

• Ensure compliance with project specifications, applicable codes, and relevant semiconductor facility requirements.
• Participate in HAZID, HAZOP, and process risk assessments.
• Coordinate requirements for leak detection, containment, safe handling, and maintenance access, where applicable.
• Implement design checking and quality assurance procedures.
• Identify and mitigate risks related to process performance, contamination, constructability, and system reliability.

J. Engineering Team and Schedule Management

• Plan engineering deliverables, design review milestones, and resource requirements.
• Allocate tasks and coordinate the work of slurry design engineers and designers.
• Monitor deliverable quality, progress, and compliance with project schedules.
• Coordinate design priorities with procurement, construction, and commissioning teams.
• Resolve technical issues and escalate critical constraints to project leadership.

3. Qualifications and Experience

• Bachelor’s degree in Chemical Engineering, Mechanical Engineering, or a relevant engineering discipline.
• Minimum 10 years of relevant engineering experience in slurry systems, process utilities, piping design, or semiconductor facility engineering.
• Experience in semiconductor fabrication facilities is strongly preferred.
• Practical experience in CMP slurry supply, storage, distribution, recirculation, and point-of-use delivery is desirable.
• Experience in hydraulic analysis, equipment sizing, vendor coordination, and detailed engineering is required.

4. Technical Competencies

• Strong understanding of slurry system design, PFDs, P&IDs, hydraulic calculations, and pump selection.
• Knowledge of slurry properties, particle handling, sedimentation, contamination control, and filtration.
• Experience with pumps, storage tanks, mixing systems, filters, valves, piping, and instrumentation.
• Understanding of high-purity and chemical-resistant piping materials.
• Ability to review hydraulic models, interpret calculation results, and validate design assumptions.
• Strong technical documentation and interdisciplinary coordination skills.

5. Key Performance Indicators

• Timely completion and approval of engineering deliverables.
• Compliance with CMP tool and slurry supplier requirements.
• Timely closure of design review comments and technical queries.
• Reduction of design clashes, engineering rework, and site-related design issues.
• Technical compliance of vendor packages and procurement documents.
• Achievement of agreed design quality, reliability, and contamination-control requirements.

6. Key Competencies

• Technical leadership and engineering decision-making.
• Strong analytical and troubleshooting skills.
• Design planning and multidisciplinary coordination.
• Vendor management and technical evaluation.
• Quality assurance, risk management, and schedule control.

Effective communication and engineering team coordination.